介绍了各种类型的微机械硅加速度计的工作原理及特性, 通过比较各类型硅加速度计的优劣, 提出了高灵敏度硅加速度计的设计思路及实现方法。-Describes the various types of micro-mechanical silicon accelerometers working principle and characteristics of various types by comparing the advantages and disadvantages of silicon